IP Library › Patent Application 60724757
Patent Application Provisional
App. No. 60/724,757 · Confirmation No. 6512

Ti, Ta, Hf, Zr and related metal silicon amides for ALD/CVD of metal-silicon nitrides, oxides or oxynitrides

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2005-10-07 TRNA Transmittal of New Application 1 View
2005-10-07 SPEC Specification 9 View
2005-10-07 CLM Claims 9 View
2005-10-07 ABST Abstract 1 View
2005-10-07 DRW Drawings-only black and white line drawings 2 View
2005-10-07 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/724,757
Filed
2005-10-07