Patent Application
Provisional
App. No. 60/731,608
· Confirmation No. 1580
Plasma for patterning advanced gate stacks
Provisional Application Expired
Inventors
Denis Shamiryan
Leuven, BELGIUM
Vasile Paraschiv
Kessel-Lo, BELGIUM
Marc Demand
Jandrain-Jandrenouille, BELGIUM
Werner Boullart
Binkom, BELGIUM
Attorneys & Agents of Record
Prosecution
- Customer No.
- 20995
- Docket No.
- IMEC408.001PRF
- Confirmation No.
- 1580
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/731,608
- Filed
- 2005-10-28
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