IP Library › Patent Application 60771583
Patent Application Provisional
App. No. 60/771,583 · Confirmation No. 7872

Disposable liners for etch chambers and etch chamber components

Inventor: David P. Laube
Provisional Application Expired
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 Code Description Pages PDF
2006-02-08 TRNA Transmittal of New Application 2 View
2006-02-08 SPEC Specification 4 View
2006-02-08 CLM Claims 3 View
2006-02-08 ADS Application Data Sheet 2 View
2006-02-08 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/771,583
Filed
2006-02-08