IP Library › Patent Application 60792629
Patent Application Provisional
App. No. 60/792,629 · Confirmation No. 3032

Fluoride-modified silica sols for chemical mechanical planarization

Provisional Application Expired
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 Code Description Pages PDF
2006-04-18 TRNA Transmittal of New Application 1 View
2006-04-18 SPEC Specification 34 View
2006-04-18 CLM Claims 4 View
2006-04-18 ABST Abstract 1 View
2006-04-18 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/792,629
Filed
2006-04-18