CORROSION RESISTANT WAFER PROCESSING APPARATUS AND METHOD FOR MAKING THEREOF

Provisional Application Expired

	Code	Description	Pages	PDF
2006-07-06	`TRNA`	Transmittal of New Application	2	View
2006-07-06	`DRW`	Drawings-only black and white line drawings	6	View
2006-07-06	`SPEC`	Specification	25	View
2006-07-06	`CLM`	Claims	4	View
2006-07-06	`ABST`	Abstract	1	View
2006-07-06	`WFEE`	Fee Worksheet (SB06)	2	View
2006-07-06	`N417`	Electronic Filing System Acknowledgment Receipt	2	View

Inventors

Benjamin L. Olechnowicz Stow, OH

David M. Rusinko Parma Heights, OH

Wei Fan Middleburg Heights, OH

Victor L. Lou Schenectady, NY

Xiang Liu Medina, OH

Jennifer Klug North Olmsted, OH

Demetrius Sarigiannis Medina, OH

Marc Schaepkens Medina, OH

Douglas A. Longworth Brecksville, OH

Attorneys & Agents of Record

HANH PHAM Reg. 40771 Attorney · KRATON PERFORMANCE POLYMERS, INC

ROCCO BARRESE Reg. 25253 Attorney · DILWORTH AND BARRESE

PETER DILWORTH Reg. 26450 Attorney · DILWORTH AND BARRESE LLP

GEORGE KAPLAN Reg. 28375 Attorney

JOSEPH OSTROFF Reg. 39321 Attorney · MOMENTIVE PERFORMANCE MATERIALS INC.

DAVID CUPAR Reg. 47510 Attorney · MCDONALD HOPKINS BURKE AND HABER CO LPA

JOSEPH WATERS Reg. 50427 Attorney · MOMENTIVE PERFORMANCE MATERIALS

SCOTT SLABY Reg. 53603 Attorney · RENNER, OTTO, BOISSELLE & SKLAR, LLP

Prosecution

JPMORGAN CHASE BANK, N.A. AS ADMINISTRATIVE AGENT

from MOMENTIVE PERFORMANCE MATERIALS GMBH & CO. KG, MOMENTIVE PERFORMANCE MATERIALS HOLDINGS INC., MOMENTIVE PERFORMANCE MATERIALS JAPAN HOLDINGS GK

SECURITY AGREEMENT Recorded 2007-07-03

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