IP Library › Patent Application 60815905
Patent Application Provisional
App. No. 60/815,905 · Confirmation No. 6810

MEMS device having a recessed cavity and methods therefor

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2006-06-21 TRNA Transmittal of New Application 3 View
2006-06-21 SPEC Specification 23 View
2006-06-21 CLM Claims 3 View
2006-06-21 ABST Abstract 1 View
2006-06-21 DRW Drawings-only black and white line drawings 9 View
2006-06-21 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/815,905
Filed
2006-06-21