Patent Application
Provisional
App. No. 60/874,653
· Confirmation No. 2563
Cyclic chemical vapor deposition of metal-silicon containing films
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2007-12-28 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2007-12-19 | PD.TO.AUTH |
Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office | 1 | View | |
| 2007-12-19 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2007-02-20 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2006-12-13 | TRNA |
Transmittal of New Application | 2 | View | |
| 2006-12-13 | SPEC |
Specification | 7 | View | |
| 2006-12-13 | CLM |
Claims | 7 | View | |
| 2006-12-13 | ABST |
Abstract | 1 | View | |
| 2006-12-13 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Xinjian Lei
Vista, CA
Hareesh Thridandam
Vista, CA
Manchao Xiao
San Diego, CA
Heather Regina Bowen
Vista, CA
Thomas Richard Gaffney
Carlsbad, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 23543
- Docket No.
- 07037Z USA
- Confirmation No.
- 2563
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/874,653
- Filed
- 2006-12-13
External Links