Patent Application
Provisional
App. No. 60/890,824
· Confirmation No. 9223
EQUIPMENT AND METHODS FOR ETCHING OF MEMS
Provisional Application Expired
|
⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2007-06-14 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2007-03-14 | PEFN |
Pre-Exam Formalities Notice | 2 | View | |
| 2007-03-14 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2007-02-20 | SPEC |
Specification | 27 | View | |
| 2007-02-20 | ABST |
Abstract | 1 | View | |
| 2007-02-20 | DRW |
Drawings-only black and white line drawings | 16 | View | |
| 2007-02-20 | ADS |
Application Data Sheet | 3 | View | |
| 2007-02-20 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2007-02-20 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Khurshid Syed Alam
Mountain View, CA
David Heald
Solvang, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 59747
- Docket No.
- QCO.169PR
- Confirmation No.
- 9223
Child
Claims priority from a provisional application
→
App. 12/527,864
· US 8,536,059
Filed 2010-03-04
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
PCT
Claims priority from a provisional application
→
PCT/US2008/054222
Filed 2008-02-18
· RO PROCESSING COMPLETED-PLACED IN STORAGE
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2016-08-31
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2008-02-27
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2007-03-30
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Quick Facts
- App. No.
- 60/890,824
- Filed
- 2007-02-20
External Links