IP Library › Patent Application 60903734
Patent Application Provisional
App. No. 60/903,734 · Confirmation No. 9117

Plasma enhanced cyclic chemical vapor deposition of silicon nitride

Provisional Application Expired
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2007-02-27 SPEC Specification 16 View
2007-02-27 CLM Claims 2 View
2007-02-27 ABST Abstract 1 View
2007-02-27 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/903,734
Filed
2007-02-27