IP Library › Patent Application 60912128
Patent Application Provisional
App. No. 60/912,128 · Confirmation No. 2885

PROCESS OF CLEANING A SUBSTRATE FOR MICROELECTRONIC APPLICATIONS INCLUDING DIRECTING MECHANICAL ENERGY THROUGH A FLUID BATH AND APPARATUS OF SAME

Inventor: Oh-Hun Kwon
Provisional Application Expired
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 Code Description Pages PDF
2007-04-26 APP.FILE.REC Filing Receipt 3 View
2007-04-16 SPEC Specification 17 View
2007-04-16 CLM Claims 9 View
2007-04-16 ABST Abstract 1 View
2007-04-16 DRW Drawings-only black and white line drawings 6 View
2007-04-16 ADS Application Data Sheet 4 View
2007-04-16 TRNA Transmittal of New Application 2 View
2007-04-16 WFEE Fee Worksheet (SB06) 2 View
2007-04-16 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
60/912,128
Filed
2007-04-16