Patent Application
Provisional
App. No. 60/930,634
· Confirmation No. 8853
Side opening substrate carrier and load port
Provisional Application Expired
Inventors
Daniel Babbs
Belmont, MA
William Fosnight
Carlisle, MA
Robert C. May
Austin, TX
William Weaver
Chelmsford, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 2512
- Docket No.
- 309P012904-US(-#1)
- Confirmation No.
- 8853
Child
PCT
Claims priority from a provisional application
→
PCT/US2008/064163
Filed 2008-05-19
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
Child
Claims priority from a provisional application
→
App. 12/123,391
· US 9,105,673
Filed 2008-05-19
· Patented Case
Child
Claims priority from a provisional application
→
App. 15/986,710
· US 11,201,070
Filed 2018-05-22
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/930,634
- Filed
- 2007-05-17
External Links