IP Library › Patent Application 60936216
Patent Application Provisional Small
App. No. 60/936,216 · Confirmation No. 2970

Method and apparatus for a bevel etch chuck

Inventor: Herman Itzkowitz
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2007-07-06 APP.FILE.REC Filing Receipt 3 View
2007-06-18 WFEE Fee Worksheet (SB06) 1 View
2007-06-18 TRNA Transmittal of New Application 3 View
2007-06-18 SPEC Specification 9 View
2007-06-18 ADS Application Data Sheet 2 View
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Quick Facts
App. No.
60/936,216
Filed
2007-06-18