Patent Application
Provisional
App. No. 60/950,331
· Confirmation No. 1870
SUBSTRATE PROCESSING APPARATUS WITH MOTORS INTEGRAL TO CHAMBER WALLS
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2007-07-30 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2007-07-17 | TRNA |
Transmittal of New Application | 2 | View | |
| 2007-07-17 | SPEC |
Specification | 21 | View | |
| 2007-07-17 | DRW |
Drawings-only black and white line drawings | 28 | View | |
| 2007-07-17 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2007-07-17 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Alex Krupyshev
Chelmsford, MA
Christopher Hofmeister
Hampstead, NH
Attorneys & Agents of Record
Prosecution
- Customer No.
- 2512
- Docket No.
- 390P013018-US(-#1)
- Confirmation No.
- 1870
Child
Claims priority from a provisional application
→
App. 13/219,267
· US 8,237,391
Filed 2011-08-26
· Patented Case
Child
Claims priority from a provisional application
→
App. 13/567,812
· US 8,680,803
Filed 2012-08-06
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2008/070346
Filed 2008-07-17
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 12/175,278
· US 8,008,884
Filed 2008-07-17
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/950,331
- Filed
- 2007-07-17
External Links