Patent Application
Provisional
App. No. 60/972,748
· Confirmation No. 8084
ETCHING PROCESSES USED IN MEMS PRODUCTION
Inventors:
Xiaoming Yan, Chok Ho, David Heald, Evgeni Gousev, Khurshid Alam, Philip Floyd, Teruo Sasagawa
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2007-11-29 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2007-11-21 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 1 | View | |
| 2007-11-21 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2007-11-21 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2007-11-21 | ADS |
Application Data Sheet | 7 | View | |
| 2007-09-26 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2007-09-26 | PEFN |
Pre-Exam Formalities Notice | 2 | View | |
| 2007-09-14 | ADS |
Application Data Sheet | 6 | View | |
| 2007-09-14 | DRW |
Drawings-only black and white line drawings | 13 | View | |
| 2007-09-14 | SPEC |
Specification | 35 | View | |
| 2007-09-14 | CLM |
Claims | 4 | View | |
| 2007-09-14 | ABST |
Abstract | 1 | View | |
| 2007-09-14 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2007-09-14 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Xiaoming Yan
Sunnyvale, CA
Chok Ho
Milpitas, CA
David Heald
Solvang, CA
Evgeni Gousev
Saratoga, CA
Khurshid Alam
Mountain View, CA
Philip Floyd
Redwood City, CA
Teruo Sasagawa
Los Gatos, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 59747
- Docket No.
- QCO.231PR/072388P1
- Confirmation No.
- 8084
Child
PCT
Claims priority from a provisional application
→
PCT/US2008/076077
Filed 2008-09-11
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 14/286,119
Filed 2014-05-23
· Abandoned -- Incomplete Application (Pre-examination)
Child
Claims priority from a provisional application
→
App. 12/210,042
· US 8,323,516
Filed 2008-09-12
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 12/210,026
Filed 2008-09-12
· Abandoned -- After Examiner's Answer or Board of Appeals Decision
Child
Claims priority from a provisional application
→
App. 12/210,138
Filed 2008-09-12
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 12/210,010
· US 8,308,962
Filed 2008-09-12
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2016-08-31
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2008-02-27
from
ALAM, KHURSHID,
FLOYD, PHILIP,
SASAGAWA, TERUO,
GOUSEV, EVGENI,
YAN, XIAOMING,
HEALD, DAVID,
HO, CHOK
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2007-11-19
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Quick Facts
- App. No.
- 60/972,748
- Filed
- 2007-09-14
External Links