IP Library › Patent Application 61020658
Patent Application Provisional
App. No. 61/020,658 · Confirmation No. 8345

PROCESS OF CLEANING A SUBSTRATE FOR MICROELECTRONIC APPLICATIONS INCLUDING DIRECTING MECHANICAL ENERGY THROUGH A FLUID BATH AND APPARATUS OF SAME

Provisional Application Expired
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 Code Description Pages PDF
2008-02-20 APP.FILE.REC Filing Receipt 3 View
2008-01-11 TR.PROV Provisional Cover Sheet (SB16) 2 View
2008-01-11 WFEE Fee Worksheet (SB06) 2 View
2008-01-11 N417 Electronic Filing System Acknowledgment Receipt 3 View
2008-01-11 ADS Application Data Sheet 5 View
2008-01-11 SPEC Specification 29 View
2008-01-11 CLM Claims 12 View
2008-01-11 ABST Abstract 1 View
2008-01-11 DRW Drawings-only black and white line drawings 11 View
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Quick Facts
App. No.
61/020,658
Filed
2008-01-11