IP Library Patent Application 61140216
Patent Application Provisional
App. No. 61/140,216 · Confirmation No. 2616

Combination, Method, and Composition for Chemical Mechanical Planarization of A Tungsten-Containing Substrate

Provisional Application Expired
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2009-12-08 APP.FILE.REC Filing Receipt 3 View
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2009-12-04 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-01-23 APP.FILE.REC Filing Receipt 3 View
2008-12-23 TR.PROV Provisional Cover Sheet (SB16) 3 View
2008-12-23 SPEC Specification 16 View
2008-12-23 CLM Claims 4 View
2008-12-23 ABST Abstract 1 View
2008-12-23 WFEE Fee Worksheet (SB06) 2 View
2008-12-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/140,216
Filed
2008-12-23