IP Library › Patent Application 61171909
Patent Application Provisional Small
App. No. 61/171,909 · Confirmation No. 9271

Selective Etching of Semiconductor Substrate(s) That Preserves Underlying Dielectric Layers

Provisional Application Expired
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 Code Description Pages PDF
2009-05-07 APP.FILE.REC Filing Receipt 3 View
2009-04-23 TR.PROV Provisional Cover Sheet (SB16) 2 View
2009-04-23 WFEE Fee Worksheet (SB06) 1 View
2009-04-23 SPEC Specification 4 View
2009-04-23 WFEE Fee Worksheet (SB06) 2 View
2009-04-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/171,909
Filed
2009-04-23