IP Library Patent Application 61290692
Patent Application Provisional
App. No. 61/290,692 · Confirmation No. 4362

METHODS FOR REDUCING THE DEPOSITION OF SILICON ON REACTOR WALLS USING PERIPHERAL SILICON TETRACHLORIDE

Inventor: Henry F. Erk
Provisional Application Expired
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Code Description Pages PDF
2010-01-21 APP.FILE.REC Filing Receipt 3 View
2009-12-29 SPEC Specification 25 View
2009-12-29 CLM Claims 8 View
2009-12-29 ABST Abstract 1 View
2009-12-29 ADS Application Data Sheet 4 View
2009-12-29 DRW Drawings-only black and white line drawings 15 View
2009-12-29 WFEE Fee Worksheet (SB06) 2 View
2009-12-29 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
61/290,692
Filed
2009-12-29