Patent Application
Provisional
App. No. 61/316,114
· Confirmation No. 5688
LITHOGRAPHIC APPARATUS AND ILLUMINATION SYSTEM
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2010-04-29 | ADS |
Application Data Sheet | 2 | View | |
| 2010-04-29 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2010-03-29 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2010-03-22 | PD.TO.AUTH |
Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office | 1 | View | |
| 2010-03-22 | SPEC |
Specification | 13 | View | |
| 2010-03-22 | CLM |
Claims | 3 | View | |
| 2010-03-22 | ABST |
Abstract | 1 | View | |
| 2010-03-22 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2010-03-22 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2010-03-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2010-03-22 | TR.PROV |
Provisional Cover Sheet (SB16) | 2 | View | |
| 2010-03-22 | ADS |
Application Data Sheet | 2 | View |
Inventors
Heine Melle MULDER
Veldhoven, NETHERLANDS
Steven George HANSEN
Phoenix, AZ
Johannes Catharinus Hubertus MULKENS
Valkenswaard, NETHERLANDS
Markus DEGUENTHER
Oberkochen, GERMANY
Attorneys & Agents of Record
Prosecution
- Customer No.
- 909
- Docket No.
- 081468-0385769
- Confirmation No.
- 5688
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 61/316,114
- Filed
- 2010-03-22
External Links