IP Library › Patent Application 61389154
Patent Application Provisional Small
App. No. 61/389,154 · Confirmation No. 1525

Methods and Apparatus for High-Productivity Batch Wafer Processing

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2013-05-15 C.AD Change of Address 1 View
2010-12-29 APP.FILE.REC Filing Receipt 3 View
2010-12-27 PEFR Applicant Response to Pre-Exam Formalities Notice 1 View
2010-12-27 WFEE Fee Worksheet (SB06) 2 View
2010-12-27 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-10-25 NTC.MISS.PRT Notice to File Missing Parts 2 View
2010-10-25 APP.FILE.REC Filing Receipt 3 View
2010-10-01 TR.PROV Provisional Cover Sheet (SB16) 4 View
2010-10-01 DRW.NONBW Drawings-other than black and white line drawings 9 View
2010-10-01 SPEC Specification 5 View
2010-10-01 CLM Claims 1 View
2010-10-01 WFEE Fee Worksheet (SB06) 2 View
2010-10-01 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-10-01 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
0001-01-03 DRW.SUPP Drawings-black and white line and/or other drawings — View
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Quick Facts
App. No.
61/389,154
Filed
2010-10-01