IP Library Patent Application 61407852
Patent Application Provisional Small
App. No. 61/407,852 · Confirmation No. 6626

Integrated Cleaning Technique for Residual Defects

Provisional Application Expired
⬇ PDF
Code Description Pages PDF
2010-11-23 APP.FILE.REC Filing Receipt 3 View
2010-11-02 R48.REQ Request under Rule 48 correcting inventorship 1 View
2010-11-02 WFEE Fee Worksheet (SB06) 2 View
2010-11-02 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-10-28 TR.PROV Provisional Cover Sheet (SB16) 3 View
2010-10-28 SPEC Specification 8 View
2010-10-28 WFEE Fee Worksheet (SB06) 2 View
2010-10-28 N417 Electronic Filing System Acknowledgment Receipt 2 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
61/407,852
Filed
2010-10-28