Patent Application
Provisional
App. No. 61/427,857
· Confirmation No. 4789
CMP Slurry/Method for Polishing Ruthenium and Other Films
Inventor:
Xiaobo Shi
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-06-02 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2011-01-21 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2010-12-29 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2010-12-29 | SPEC |
Specification | 12 | View | |
| 2010-12-29 | CLM |
Claims | 3 | View | |
| 2010-12-29 | ABST |
Abstract | 1 | View | |
| 2010-12-29 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2010-12-29 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Xiaobo Shi
Chandler, AZ
Attorneys & Agents of Record
Prosecution
- Customer No.
- 143749
- Docket No.
- 07511Z USA
- Confirmation No.
- 4789
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 61/427,857
- Filed
- 2010-12-29
External Links