Patent Application
Provisional
App. No. 61/716,471
· Confirmation No. 7117
Chemical Polishing Composition for Shallow Trench Isolation (STI) Applications and Methods of Making Thereof
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-06-02 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2012-11-13 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2012-11-01 | OATH |
Oath or Declaration filed | 4 | View | |
| 2012-10-19 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2012-10-19 | SPEC |
Specification | 15 | View | |
| 2012-10-19 | CLM |
Claims | 5 | View | |
| 2012-10-19 | ABST |
Abstract | 1 | View | |
| 2012-10-19 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2012-10-19 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Xiaobo Shi
Chandler, AZ
John E.Q. Hughes
Cave Creek, AZ
Hongjun Zhou
Chandler, AZ
Daniel Hernandez Castillo II
Laveen, AZ
Jae Ouk Choo
Chandler, AZ
James Allen Schlueter
Phoenix, AZ
Jo-Ann Schwartz
Allentown, PA
Laura Ledenbach
Allentown, PA
Steve Winchester
Allentown, PA
Saifi Usmani
Phoenix, AZ
John A. Marsella
Allentown, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 143749
- Docket No.
- 07699Z USA
- Confirmation No.
- 7117
Child
Claims priority from a provisional application
→
App. 14/030,657
· US 8,859,428
Filed 2013-09-18
· Patented Case
Child
Claims priority from a provisional application
→
App. 14/709,609
· US 9,305,476
Filed 2015-05-12
· Patented Case
Child
Claims priority from a provisional application
→
App. 15/058,268
· US 10,011,741
Filed 2016-03-02
· Patented Case
Child
Claims priority from a provisional application
→
App. 14/482,590
· US 9,062,230
Filed 2014-09-10
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 61/716,471
- Filed
- 2012-10-19
External Links