Patent Application
Provisional
App. No. 61/771,476
· Confirmation No. 3558
CORRECTION OF ANGULAR ERROR OF PLANE-OF-INCIDENCE AZIMUTH OF ELLIPSOMETER
Applicant:
Nanometrics Incorporated
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2013-03-27 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2013-03-01 | SPEC |
Specification | 22 | View | |
| 2013-03-01 | CLM |
Claims | 11 | View | |
| 2013-03-01 | ABST |
Abstract | 1 | View | |
| 2013-03-01 | DRW.NONBW |
Drawings-other than black and white line drawings | 11 | View | |
| 2013-03-01 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2013-03-01 | ADS |
Application Data Sheet | 7 | View | |
| 2013-03-01 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-03-01 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2013-03-01 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View | |
| 0001-01-03 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View |
Inventors
Pedro Vagos
Chennevieres, FRANCE
Ye Feng
Portland, OR
Daniel Thompson
Milpitas, CA
Yan Zhang
Portland, OR
Attorneys & Agents of Record
Prosecution
- Customer No.
- 34036
- Docket No.
- NAN286 PV
- Confirmation No.
- 3558
Child
Claims priority from a provisional application
→
App. 13/831,456
· US 10,296,554
Filed 2013-03-14
· Patented Case
Child
Claims priority from a provisional application
→
App. 16/416,775
· US 10,621,264
Filed 2019-05-20
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2014/015168
Filed 2014-02-06
· RO PROCESSING COMPLETED-PLACED IN STORAGE
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-01-09
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Quick Facts
- App. No.
- 61/771,476
- Filed
- 2013-03-01
External Links