IP Library › Patent Application 61869093
Patent Application Provisional Small
App. No. 61/869,093 · Confirmation No. 3402

Drying device for use in a lithography system

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2013-12-23 APP.FILE.REC Filing Receipt 3 View
2013-12-12 PEFR Applicant Response to Pre-Exam Formalities Notice 1 View
2013-12-12 ADS Application Data Sheet 6 View
2013-12-12 LET. Miscellaneous Incoming Letter 1 View
2013-12-12 ADS Application Data Sheet 5 View
2013-10-18 NTC.MISS.PRT Notice to File Missing Parts 2 View
2013-10-18 APP.FILE.REC Filing Receipt 3 View
2013-08-23 ABST Abstract 1 View
2013-08-23 CLM Claims 4 View
2013-08-23 DRW Drawings-only black and white line drawings 4 View
2013-08-23 SPEC Specification 16 View
2013-08-23 ADS Application Data Sheet 6 View
2013-08-23 WFEE Fee Worksheet (SB06) 2 View
2013-08-23 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
61/869,093
Filed
2013-08-23