IP Library › Patent Application 61875321
Patent Application Provisional
App. No. 61/875,321 · Confirmation No. 6935

METHOD OF ETCHING SEMICONDUCTOR STRUCTURES WITH ETCH GASES

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2013-10-03 APP.FILE.REC Filing Receipt 3 View
2013-09-09 DRW.SUPP Drawings-black and white line and/or other drawings — View
2013-09-09 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2013-09-09 TR.PROV Provisional Cover Sheet (SB16) 2 View
2013-09-09 SPEC Specification 17 View
2013-09-09 CLM Claims 6 View
2013-09-09 ABST Abstract 1 View
2013-09-09 DRW.NONBW Drawings-other than black and white line drawings 3 View
2013-09-09 WFEE Fee Worksheet (SB06) 2 View
2013-09-09 N417 Electronic Filing System Acknowledgment Receipt 2 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
61/875,321
Filed
2013-09-09