IP Library › Patent Application 61886406
Patent Application Provisional
App. No. 61/886,406 · Confirmation No. 3318

METHODS FOR DEPOSITING SILICON NITRIDE FILMS

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2013-10-28 APP.FILE.REC Filing Receipt 3 View
2013-10-03 SPEC Specification 29 View
2013-10-03 CLM Claims 3 View
2013-10-03 ABST Abstract 1 View
2013-10-03 TR.PROV Provisional Cover Sheet (SB16) 4 View
2013-10-03 DRW Drawings-only black and white line drawings 2 View
2013-10-03 WFEE Fee Worksheet (SB06) 2 View
2013-10-03 N417 Electronic Filing System Acknowledgment Receipt 2 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
61/886,406
Filed
2013-10-03