Patent Application
Provisional
App. No. 61/913,223
· Confirmation No. 1097
SYSTEMS AND METHODS FOR USING WHITE LIGHT INTERFEROMETRY TO MEASURE UNDERCUT OF A BI-LAYER STRUCTURE
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2013-12-18 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2013-12-06 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2013-12-06 | SPEC |
Specification | 7 | View | |
| 2013-12-06 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2013-12-06 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-12-06 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Robert W. BEYE
Fremont, CA
Sean T. POH
San Jose, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 35219
- Docket No.
- F6715.P
- Confirmation No.
- 1097
Child
Claims priority from a provisional application
→
App. 14/275,502
· US 9,194,692
Filed 2014-05-12
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 14/937,971
Filed 2015-11-11
· Abandoned -- Failure to Respond to an Office Action
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 61/913,223
- Filed
- 2013-12-06
External Links