IP Library › Patent Application 61921594
Patent Application Provisional
App. No. 61/921,594 · Confirmation No. 5422

Chamber Cleaning and Semiconductor Etching Gases

Inventor: Sheng Peng
Provisional Application Expired
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 Code Description Pages PDF
2016-12-19 OATH Oath or Declaration filed 6 View
2015-11-03 OATH Oath or Declaration filed 111 View
2015-11-03 OATH Oath or Declaration filed 111 View
2015-11-03 OATH Oath or Declaration filed 111 View
2015-11-03 OATH Oath or Declaration filed 111 View
2015-11-03 OATH Oath or Declaration filed 111 View
2015-07-28 OATH Oath or Declaration filed 146 View
2015-04-15 OATH Oath or Declaration filed 114 View
2014-01-06 APP.FILE.REC Filing Receipt 3 View
2013-12-30 TR.PROV Provisional Cover Sheet (SB16) 2 View
2013-12-30 SPEC Specification 12 View
2013-12-30 CLM Claims 2 View
2013-12-30 ABST Abstract 1 View
2013-12-30 WFEE Fee Worksheet (SB06) 2 View
2013-12-30 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/921,594
Filed
2013-12-30