IP Library › Patent Application 61953699
Patent Application Provisional Small
App. No. 61/953,699 · Confirmation No. 4418

METHOD OF FABRICATING MEMS DEVICES USING PLASMA ETCHING AND DEVICE THEREFOR

Applicant: mCube Inc.
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2014-04-11 APP.FILE.REC Filing Receipt 3 View
2014-03-14 ADS Application Data Sheet 3 View
2014-03-14 SPEC Specification 7 View
2014-03-14 CLM Claims 1 View
2014-03-14 ABST Abstract 1 View
2014-03-14 DRW Drawings-only black and white line drawings 4 View
2014-03-14 WFEE Fee Worksheet (SB06) 2 View
2014-03-14 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
61/953,699
Filed
2014-03-14