IP Library › Patent Application 61970602
Patent Application Provisional
App. No. 61/970,602 · Confirmation No. 4077

LOW TEMPERATURE ATOMIC LAYER DEPOSITION OF SILICON OXIDE THIN FILMS

Provisional Application Expired
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 Code Description Pages PDF
2014-04-22 APP.FILE.REC Filing Receipt 3 View
2014-03-26 PD.TO.AUTH Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office 2 View
2014-03-26 DRW Drawings-only black and white line drawings 1 View
2014-03-26 WFEE Fee Worksheet (SB06) 2 View
2014-03-26 N417 Electronic Filing System Acknowledgment Receipt 3 View
2014-03-26 TR.PROV Provisional Cover Sheet (SB16) 4 View
2014-03-26 SPEC Specification 25 View
2014-03-26 CLM Claims 3 View
2014-03-26 ABST Abstract 1 View
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Quick Facts
App. No.
61/970,602
Filed
2014-03-26