IP Library › Patent Application 61971306
Patent Application Provisional Small
App. No. 61/971,306 · Confirmation No. 1709

Sensing Pads For Electrical Test Structures probed with Electron Beam Voltage Contrast

Provisional Application Expired
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2014-03-27 ADS Application Data Sheet 6 View
2014-03-27 SPEC Specification 6 View
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Quick Facts
App. No.
61/971,306
Filed
2014-03-27