Patent Application
Provisional
Small
App. No. 62/084,551
· Confirmation No. 9140
System and Methods for Overlay Error Compensation, Measurements, and Lithography Apparatus Control
Inventor:
Jeffrey Drue David
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2014-12-11 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2014-11-25 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2014-11-25 | ADS |
Application Data Sheet | 4 | View | |
| 2014-11-25 | SPEC |
Specification | 10 | View | |
| 2014-11-25 | ABST |
Abstract | 2 | View | |
| 2014-11-25 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2014-11-25 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Jeffrey Drue David
San Jose, CA
Prosecution
- Confirmation No.
- 9140
Child
Claims priority from a provisional application
→
App. 14/952,266
Filed 2015-11-25
· Abandoned -- Failure to Respond to an Office Action
Child
PCT
Claims priority from a provisional application
→
PCT/US2015/062693
Filed 2015-11-25
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 15/604,240
· US 10,734,293
Filed 2017-05-24
· Patented Case
Child
Claims priority from a provisional application
→
App. 15/394,540
· US 10,430,719
Filed 2016-12-29
· Patented Case
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Quick Facts
- App. No.
- 62/084,551
- Filed
- 2014-11-25
External Links