Patent Application
Provisional
App. No. 62/115,264
· Confirmation No. 1424
Dishing Reducing in Tungsten Chemical Mechanical Polishing
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-06-02 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2015-03-25 | OATH |
Oath or Declaration filed | 5 | View | |
| 2015-02-27 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2015-02-13 | R48.REQ |
Request under Rule 48 correcting inventorship | 1 | View | |
| 2015-02-13 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2015-02-13 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2015-02-13 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2015-02-12 | PD.TO.AUTH |
Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office | 2 | View | |
| 2015-02-12 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2015-02-12 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2015-02-12 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2015-02-12 | SPEC |
Specification | 35 | View | |
| 2015-02-12 | CLM |
Claims | 9 | View | |
| 2015-02-12 | ABST |
Abstract | 1 | View | |
| 2015-02-12 | DRW |
Drawings-only black and white line drawings | 4 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 143749
- Docket No.
- 07879Z USA
- Confirmation No.
- 1424
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 62/115,264
- Filed
- 2015-02-12
External Links