Patent Application
Provisional
App. No. 62/140,846
· Confirmation No. 1239
Selectively Removing Titanium Nitride Hard Mask and Etch Residue Removal
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-06-02 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2015-05-01 | OATH |
Oath or Declaration filed | 3 | View | |
| 2015-04-13 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2015-03-31 | PD.TO.AUTH |
Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office | 2 | View | |
| 2015-03-31 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2015-03-31 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2015-03-31 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2015-03-31 | SPEC |
Specification | 11 | View | |
| 2015-03-31 | CLM |
Claims | 6 | View | |
| 2015-03-31 | ABST |
Abstract | 1 | View |
Inventors
William Jack Casteel JR.
Fountain Hill, PA
Seiji Inaoka
Macungie, PA
Wen Dar Liu
Chupei City, TAIWAN
Tianniu Chen
Westford, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 143749
- Docket No.
- 07903Z USA
- Confirmation No.
- 1239
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 62/140,846
- Filed
- 2015-03-31
External Links