Patent Application
Provisional
App. No. 62/164,293
· Confirmation No. 1628
TiN Hard Mask and Etch Residue Removal
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-06-02 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2015-07-07 | OATH |
Oath or Declaration filed | 5 | View | |
| 2015-06-01 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2015-05-20 | PD.TO.AUTH |
Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office | 2 | View | |
| 2015-05-20 | SPEC |
Specification | 16 | View | |
| 2015-05-20 | CLM |
Claims | 5 | View | |
| 2015-05-20 | ABST |
Abstract | 1 | View | |
| 2015-05-20 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2015-05-20 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2015-05-20 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View |
Inventors
Wen Dar Liu
Chupei City, TAIWAN
Yi-Chia Lee
Chupei City, TAIWAN
William Jack Casteel, JR.
Fountain Hill, PA
Tianniu Chen
Westford, MA
Rajiv Krishan Agarwal
Malvern, PA
Madhukar Bhaskara Rao
Carlsbad, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 143749
- Docket No.
- 07902Z2 USA
- Confirmation No.
- 1628
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 62/164,293
- Filed
- 2015-05-20
External Links