Patent Application
Provisional
Small
App. No. 62/172,701
· Confirmation No. 1050
Microchamber laser processing systems and methods using localized process-gas atmosphere
Inventor:
James McWhirter
Applicant:
Ultratech, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2015-06-19 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2015-06-08 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2015-06-08 | SPEC |
Specification | 11 | View | |
| 2015-06-08 | CLM |
Claims | 3 | View | |
| 2015-06-08 | ABST |
Abstract | 1 | View | |
| 2015-06-08 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2015-06-08 | ADS |
Application Data Sheet | 7 | View | |
| 2015-06-08 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2015-06-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
James McWhirter
San Jose, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 53590
- Docket No.
- VT140-15P
- Confirmation No.
- 1050
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Quick Facts
- App. No.
- 62/172,701
- Filed
- 2015-06-08
External Links