METHODS FOR DEPOSITING SILICON NITRIDE FILMS

Inventors: Xinjian Lei, Manchao Xiao

Provisional Application Expired

	Code	Description	Pages	PDF
2015-08-14	`APP.FILE.REC`	Filing Receipt	3	View
2015-07-31	`PD.TO.AUTH`	Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office	2	View
2015-07-31	`WFEE`	Fee Worksheet (SB06)	2	View
2015-07-31	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2015-07-31	`TR.PROV`	Provisional Cover Sheet (SB16)	3	View
2015-07-31	`SPEC`	Specification	28	View
2015-07-31	`CLM`	Claims	5	View
2015-07-31	`ABST`	Abstract	1	View

Inventors

Xinjian Lei Vista, CA

Manchao Xiao San Diego, CA

Attorneys & Agents of Record

ROSALEEN MORRIS Reg. 47321 Attorney · DRAEGER MEDICAL SYSTEMS INC.

AMY CARR-TREXLER Reg. 51531 Attorney · AIR PRODUCTS AND CHEMICALS, INC.

ROBERT DIAZ Reg. 55109 Attorney · AIR PRODUCTS AND CHEMICALS, INC.

MATTHEW WEAVER Reg. 64128 Attorney · AIR PRODUCTS AND CHEMICALS, INC.

DALESIA BOYD Reg. 65561 Attorney · EDMONDS & CMAIDALKA

JASON PLOEGER Reg. 76863 Agent · AIR PRODUCTS AND CHEMICALS, INC.

Prosecution

No recorded assignments were found for this patent.

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