Patent Application
Provisional
App. No. 62/217,296
· Confirmation No. 6014
Methods for Depositing a Conformal Group 13-Doped Metal or Metalloid Silicon Nitride Film
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2015-09-28 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2015-09-11 | PD.TO.AUTH |
Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office | 2 | View | |
| 2015-09-11 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2015-09-11 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2015-09-11 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2015-09-11 | SPEC |
Specification | 33 | View | |
| 2015-09-11 | CLM |
Claims | 5 | View | |
| 2015-09-11 | ABST |
Abstract | 1 | View | |
| 2015-09-11 | DRW |
Drawings-only black and white line drawings | 2 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 23543
- Docket No.
- 07929Z USA
- Confirmation No.
- 6014
Child
PCT
Claims priority from a provisional application
→
PCT/US2016/050874
Filed 2016-09-09
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 15/757,805
· US 11,104,990
Filed 2018-03-06
· Patented Case
Child
Claims priority from a provisional application
→
App. 17/458,183
· US 11,732,351
Filed 2021-08-26
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 62/217,296
- Filed
- 2015-09-11
External Links