IP Library › Patent Application 62281658
Patent Application Provisional
App. No. 62/281,658 · Confirmation No. 1027

TiN Hard Mask and Etch Residue Removal

Provisional Application Expired
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 Code Description Pages PDF
2017-06-02 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2016-06-06 OATH Oath or Declaration filed 4 View
2016-06-06 OATH Oath or Declaration filed 3 View
2016-06-06 N417 Electronic Filing System Acknowledgment Receipt 2 View
2016-02-19 APP.FILE.REC Filing Receipt 3 View
2016-01-21 TR.PROV Provisional Cover Sheet (SB16) 4 View
2016-01-21 SPEC Specification 18 View
2016-01-21 CLM Claims 5 View
2016-01-21 ABST Abstract 1 View
2016-01-21 WFEE Fee Worksheet (SB06) 2 View
2016-01-21 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
62/281,658
Filed
2016-01-21