Patent Application
Provisional
App. No. 62/320,142
· Confirmation No. 8365
ON THE FLY AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
Applicant:
Brooks Automation, Inc.
Provisional Application Expired
|
⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2016-04-26 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2016-04-08 | DRW |
Drawings-only black and white line drawings | 25 | View | |
| 2016-04-08 | SPEC |
Specification | 99 | View | |
| 2016-04-08 | ADS |
Application Data Sheet | 9 | View | |
| 2016-04-08 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2016-04-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 106446
- Docket No.
- 390P015253-US(-#2)
- Confirmation No.
- 8365
Child
Claims priority from a provisional application
→
App. 18/480,297
Filed 2023-10-03
· Abandoned -- Failure to Respond to an Office Action
Child
PCT
Claims priority from a provisional application
→
PCT/US2016/042142
Filed 2016-07-13
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
Child
Claims priority from a provisional application
→
App. 15/209,497
· US 10,134,623
Filed 2016-07-13
· Patented Case
Child
Claims priority from a provisional application
→
App. 17/229,495
· US 11,776,834
Filed 2021-04-13
· Patented Case
Child
Claims priority from a provisional application
→
App. 16/197,087
· US 10,978,330
Filed 2018-11-20
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 62/320,142
- Filed
- 2016-04-08
External Links