Patent Application
Provisional
App. No. 62/361,325
· Confirmation No. 7882
SUBSTRATE PROCESSING APPARATUS
Applicant:
BROOKS AUTOMATION, INC.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2016-07-27 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2016-07-12 | SPEC |
Specification | 56 | View | |
| 2016-07-12 | DRW |
Drawings-only black and white line drawings | 22 | View | |
| 2016-07-12 | ADS |
Application Data Sheet | 8 | View | |
| 2016-07-12 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2016-07-12 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Vincent W. TSANG
Lincoln, MA
Charles W. SU
Stratham, NH
Attorneys & Agents of Record
Prosecution
- Customer No.
- 106446
- Docket No.
- 390P015313-US(-#1)
- Confirmation No.
- 7882
Child
PCT
Claims priority from a provisional application
→
PCT/US2017/041177
Filed 2017-07-07
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
Child
Claims priority from a provisional application
→
App. 18/516,362
Filed 2023-11-21
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 15/634,871
· US 11,270,904
Filed 2017-06-27
· Patented Case
Child
Claims priority from a provisional application
→
App. 17/653,978
· US 11,823,944
Filed 2022-03-08
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 62/361,325
- Filed
- 2016-07-12
External Links