Patent Application
Provisional
App. No. 62/420,953
· Confirmation No. 1009
System to Deliver Highly Dilute NH4-OH for Wafer Rinsing in Semiconductor Manufacturing
Applicant:
MKS Instruments, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2016-11-23 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2016-11-11 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2016-11-11 | ADS |
Application Data Sheet | 9 | View | |
| 2016-11-11 | SPEC |
Specification | 10 | View | |
| 2016-11-11 | DRW.NONBW |
Drawings-other than black and white line drawings | 5 | View | |
| 2016-11-11 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2016-11-11 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2016-11-11 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View | |
| 2016-11-11 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View |
Inventors
Johannes Seiwert
Berlin, GERMANY
Christiane Gottschalk
Berlin, GERMANY
Ulrich Brammer
Berlin, GERMANY
Attorneys & Agents of Record
Prosecution
- Customer No.
- 42532
- Docket No.
- ASX-185PR
- Confirmation No.
- 1009
Child
Claims priority from a provisional application
→
App. 17/005,560
· US 11,826,713
Filed 2020-08-28
· Patented Case
Child
Claims priority from a provisional application
→
App. 15/808,471
· US 10,773,221
Filed 2017-11-09
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2017/060896
Filed 2017-11-09
· RO PROCESSING COMPLETED-PLACED IN STORAGE
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 62/420,953
- Filed
- 2016-11-11
External Links