IP Library › Patent Application 62431790
Patent Application Provisional
App. No. 62/431,790 · Confirmation No. 6693

Wafer chuck with contractable sealing devices for securing warped wafers

Applicant: Ultratech, Inc.
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2017-10-19 SES.LOSS.ELC Notification of loss of entitlement to small entity status via Patent Application Information Retrieval (PAIR) 1 View
2017-10-19 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2017-07-12 PA.. Power of Attorney 1 View
2017-07-12 N417 Electronic Filing System Acknowledgment Receipt 2 View
2016-12-21 APP.FILE.REC Filing Receipt 3 View
2016-12-21 APP.FILE.REC Filing Receipt 3 View
2016-12-08 ADS Application Data Sheet 8 View
2016-12-08 TR.PROV Provisional Cover Sheet (SB16) 3 View
2016-12-08 SPEC Specification 15 View
2016-12-08 CLM Claims 5 View
2016-12-08 ABST Abstract 1 View
2016-12-08 DRW Drawings-only black and white line drawings 14 View
2016-12-08 WFEE Fee Worksheet (SB06) 2 View
2016-12-08 N417 Electronic Filing System Acknowledgment Receipt 3 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
62/431,790
Filed
2016-12-08