IP Library › Patent Application 62450818
Patent Application Provisional
App. No. 62/450,818 · Confirmation No. 7628

METHOD AND APPARATUS FOR SUBSTRATE TRANSPORT APPARATUS POSITION COMPENSATION

Provisional Application Expired
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 Code Description Pages PDF
2017-02-03 APP.FILE.REC Filing Receipt 3 View
2017-01-26 WFEE Fee Worksheet (SB06) 2 View
2017-01-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2017-01-26 WFEE Fee Worksheet (SB06) 2 View
2017-01-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2017-01-26 WFEE Fee Worksheet (SB06) 2 View
2017-01-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2017-01-26 SPEC Specification 76 View
2017-01-26 DRW Drawings-only black and white line drawings 19 View
2017-01-26 ADS Application Data Sheet 9 View
2017-01-26 WFEE Fee Worksheet (SB06) 2 View
2017-01-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
62/450,818
Filed
2017-01-26