Patent Application
Provisional
App. No. 62/554,772
· Confirmation No. 6827
COMPOSITIONS AND METHODS FOR ETCHING SILICON NITRIDE-CONTAINING SUBSTRATES
Inventors:
Emanuel Cooper, Steven Bilodeau, Wen-Haw Dai, Min-Chieh Yang, Sheng-Hung Tu, Hsing-Chen Wu, Sean Kim, SeongJin Hong
Applicant:
Entegris, Inc.
Provisional Application Expired
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-09-12 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2017-09-06 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2017-09-06 | ADS |
Application Data Sheet | 8 | View | |
| 2017-09-06 | SPEC |
Specification | 22 | View | |
| 2017-09-06 | CLM |
Claims | 7 | View | |
| 2017-09-06 | ABST |
Abstract | 1 | View | |
| 2017-09-06 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2017-09-06 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2017-09-06 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Emanuel Cooper
Scarsdale, NY
Steven Bilodeau
Oxford, CT
Wen-Haw Dai
Hsinchu County, TAIWAN
Min-Chieh Yang
Hsinchu County, TAIWAN
Sheng-Hung Tu
Hsinchu City, TAIWAN
Hsing-Chen Wu
Hsinchu County, TAIWAN
Sean Kim
Gyeonggi-do, KOREA, REPUBLIC OF
SeongJin Hong
Cheongju-si, KOREA, REPUBLIC OF
Attorneys & Agents of Record
Prosecution
- Customer No.
- 144070
- Docket No.
- 201700015 US PRV
- Confirmation No.
- 6827
from
HONG, SEONGJIN,
COOPER, EMANUEL I.,
DAI, WEN-HAW,
WU, HSING-CHEN,
YANG, MIN-CHIEH,
BILODEAU, STEVEN
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-04-02
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- App. No.
- 62/554,772
- Filed
- 2017-09-06
External Links