Patent Application
Provisional
App. No. 62/559,778
· Confirmation No. 5894
Cooled Focus Ring for Plasma Processing Apparatus
Inventor:
Martin L. Zucker
Applicant:
Mattson Technology, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2021-06-25 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2017-09-21 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2017-09-18 | PA.. |
Power of Attorney | 2 | View | |
| 2017-09-18 | ADS |
Application Data Sheet | 8 | View | |
| 2017-09-18 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2017-09-18 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2017-09-18 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2017-09-18 | SPEC |
Specification | 11 | View | |
| 2017-09-18 | CLM |
Claims | 4 | View | |
| 2017-09-18 | ABST |
Abstract | 1 | View | |
| 2017-09-18 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2017-09-18 | TRAN.LET |
Transmittal Letter | 1 | View |
Inventors
Martin L. Zucker
Orinda, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 177432
- Docket No.
- AGX-245-P
- Confirmation No.
- 5894
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 62/559,778
- Filed
- 2017-09-18
External Links