Patent Application
Provisional
App. No. 62/578,725
· Confirmation No. 1538
Inductively Coupled Plasma Wafer Bevel Strip Apparatus
Applicant:
Mattson Technology, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2021-06-25 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2017-11-17 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2017-10-30 | PA.. |
Power of Attorney | 2 | View | |
| 2017-10-30 | ADS |
Application Data Sheet | 9 | View | |
| 2017-10-30 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2017-10-30 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2017-10-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2017-10-30 | SPEC |
Specification | 14 | View | |
| 2017-10-30 | CLM |
Claims | 5 | View | |
| 2017-10-30 | ABST |
Abstract | 1 | View | |
| 2017-10-30 | DRW |
Drawings-only black and white line drawings | 10 | View | |
| 2017-10-30 | 136A |
Authorization for Extension of Time all replies | 1 | View | |
| 2017-10-30 | TRAN.LET |
Transmittal Letter | 1 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 177432
- Docket No.
- AGX-260-P
- Confirmation No.
- 1538
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 62/578,725
- Filed
- 2017-10-30
External Links