Patent Application
Provisional
App. No. 62/645,476
· Confirmation No. 6200
Support Plate for Localized Heating in Thermal Processing Systems
Applicant:
Mattson Technology, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2021-06-25 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2018-04-06 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2018-03-20 | PA.. |
Power of Attorney | 2 | View | |
| 2018-03-20 | ADS |
Application Data Sheet | 9 | View | |
| 2018-03-20 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2018-03-20 | SPEC |
Specification | 18 | View | |
| 2018-03-20 | CLM |
Claims | 5 | View | |
| 2018-03-20 | ABST |
Abstract | 1 | View | |
| 2018-03-20 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2018-03-20 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2018-03-20 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2018-03-20 | TRAN.LET |
Transmittal Letter | 1 | View |
Inventors
Rolf Bremensdorfer
Bibertal, GERMANY
Johannes Keppler
Palo Alto, CA
Michael X. Yang
Palo Alto, CA
Thorsten Hülsmann
Dornstadt, GERMANY
Attorneys & Agents of Record
Prosecution
- Customer No.
- 177432
- Docket No.
- AGX-275-P
- Confirmation No.
- 6200
Child
PCT
Claims priority from a provisional application
→
PCT/US2019/022681
Filed 2019-03-18
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 16/356,074
· US 11,521,868
Filed 2019-03-18
· Patented Case
Child
Claims priority from a provisional application
→
App. 19/654,047
Filed 2026-04-21
· Docketed New Case - Ready for Examination
Child
Claims priority from a provisional application
→
App. 18/787,295
· US 12,635,451
Filed 2024-07-29
· Patented Case
Child
Claims priority from a provisional application
→
App. 18/074,713
· US 12,080,568
Filed 2022-12-05
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 62/645,476
- Filed
- 2018-03-20
External Links