Patent Application
Provisional
App. No. 62/646,867
· Confirmation No. 5398
Multi-Sensor Gas Sampling Detection System for Radical Gases and Short-Lived Molecules and Method of Use
Applicant:
MKS Instruments Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2018-03-27 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2018-03-22 | ADS |
Application Data Sheet | 9 | View | |
| 2018-03-22 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2018-03-22 | SPEC |
Specification | 63 | View | |
| 2018-03-22 | CLM |
Claims | 1 | View | |
| 2018-03-22 | ABST |
Abstract | 1 | View | |
| 2018-03-22 | DRW |
Drawings-only black and white line drawings | 31 | View | |
| 2018-03-22 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2018-03-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Xing Chen
Lexington, MA
Johannes Chiu
Bedford, MA
Chiu-Ying Tai
Chelmsford, MA
Michael Harris
Hudson, MA
Atul Gupta
Lexington, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 45134
- Docket No.
- 0195-800WIL-18P2
- Confirmation No.
- 5398
Child
Claims priority from a provisional application
→
App. 16/205,064
· US 11,262,340
Filed 2018-11-29
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2018/063124
Filed 2018-11-29
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 17/583,712
· US 11,733,224
Filed 2022-01-25
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 62/646,867
- Filed
- 2018-03-22
External Links